the Bell Jar's Vacuum Technology Forum
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Author Topic: Vacuum Basics  (Read 1773 times)
EDWIN
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« on: August 18, 2009, 12:15:26 AM »

Hi all,

   I am new to this forum; I work for one of thin film equipment manufacturer as I am new to this arena I have few basic doubts to clear, can any of you please clarify me

1.   Why turbo molecular pumps required back-up vacuum pumps?
2.   What will happen if the pump doesn’t have backup pump? (vanes will bent or stall)
3.   Is there any guideline to pick the backup pump?
4.   Can’t the TMP be started at atmospheric pressure at inlet to create vacuum?
5.   What is exact function of Gas ballasting valve in Vane pump?



Thanks in advance
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verdatum
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« Reply #1 on: August 25, 2009, 11:50:59 AM »

Hi, I'm new to vacuum technology myself, but I've been doing a lot of reading.  Until someone more knowledgeable drifts by, here's what I know
1. A backing pump is needed to reduce the resistance to displacing gas from the chamber to the exhaust side.  If there is normal atmosphere in the way, the gasses won't be able to escape.

2. I don't recall seeing any warning against this, I think you just won't be able to reach a high vacuum.

3. There are lots of recommendations out there concerning backing/roughing pumps.  The main decision seems to be oiled vs. oil-free.  (My main decision factor was cost.)  I recommend looking at the articles discussing mechanical pumps at http://www.vacuumlab.com/articles.htm

4. I've wondered about this one myself.  However, I'm probably never going to be able to afford a TMP, so I don't think I'll get to experiment any time soon Smiley

5. Gas ballast lets in dry air either from the atmosphere, or from a source like dry nitrogen gas, to mix with the air from the chamber being drawn into the pump.  This reduces the amount of condensation of vapor (namely water-vapor) in the pump.  Condensation should be avoided as the liquid mixes with the mechanical pump oil, which lowers it's vacuum speed and lowest effective vacuum rating.  "#50 – Gas Purge Solutions to Oil and Water Contamination Problems" found at the above link explains in greater detail.

I hope that helps at least a little.
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